| Name | CAS No. | Details |
| (Chloromethyl)dimethylchlorosilane | 1719-57-9 |  |
| (Chloromethyl)-methyl-dichlorosilane | 1558-33-4 | |
| chloromethyltrichlorosilane | 1558-25-4 | |
| (Dichloromethyl)dimethylchlorosilane | 18171-59-0 | |
| (Dichloromethyl)methyldichlorosilane | 1558-31-2 | |
| (Dichloromethyl)trichlorosilane | 1558-24-3 | |
| methyltrimethoxysilane | 1185-55-3 | |
| Methyltriethoxysilane | 2031-67-6 | |
| Dimethoxydimethylsilane | 1112-39-6 | |
| Diethoxydimethylsilane | 78-62-6 | |
| Trimethylmethoxysilane | 1825-61-2 | |
| Trimethylethoxysilane | 1825-62-3 | |
| Chloromethyltrimethoxysilane | 5926-26-1 | |
| (Chloromethyl)triethoxysilane | 15267-95-5 | |
| Chloromethyl(methyl)dimethoxysilane | 2212-11-5 | |
- (Chloromethyl)dimethylchlorosilane
- (Chloromethyl)-methyl-dichlorosilane
- chloromethyltrichlorosilane
- (Dichloromethyl)dimethylchlorosilane
- (Dichloromethyl)methyldichlorosilane
- (Dichloromethyl)trichlorosilane
- methyltrimethoxysilane
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